Characterization of the fabricated chip is performed in order to observe the surface characteristics. Roughness and its effect on sensitivity are observed at different thicknesses of the adhesion ...

†Present address: Laboratoire de Physique de la Matière Condensée et Nanostructures, Université Lyon 1, CNRS, UMR 5586, 69622 Villeurbanne, France. Article Views are the COUNTER-compliant sum of full ...