Determining the ideal etch conditions to remove rough areas of the line and space resist pattern after EUV exposure.

With the declared aim of measuring matter under extreme pressure, an international research collaboration headed by the ...

One of the most profound open questions in modern physics is: "Is gravity quantum?" The other fundamental ...

Researchers at the University of Michigan have developed the nation’s most powerful laser. The latest design has nearly ...

As a mom of college students, I love visiting my kids on campus. There’s nothing better than getting to spend time with them ...