Cluster tool scheduling occupies a pivotal role in semiconductor manufacturing, enabling the efficient coordination of complex multi-chamber systems that integrate processing and cleaning operations.

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Abstract: We examine a new scheduling problem of in-line multiple cluster tools. A cluster tool has been popularly used for wafer fabrication processes such as lithography, etching, deposition, and ...

Abstract: The performance of cluster tools is gaining ever-increasing importance as the semiconductor industry migrates to larger wafer sizes, and smaller device geometries. Customers demand higher ...